Solid
State
The Solid State Facilities occupy a 7,000-square-foot
laboratory that contains a clean room for device processing. Major
capital equipment items include sub-micron-resolution mask aligners, sputtering
systems, a dual e-gun deposition system, thermal evaporators, a chemical
vapor deposition system, a reactive ion etching system, an ion milling
system, plasma etching, wet processing, a darkroom facility with step-and-repeat
camera, numerous furnaces and ovens, two laser-trimming systems, a scanning
electron microscope, optical microscopes, thin-film thickness monitor,
and an ellipsometer.
The Microwave Facilities include a Hewlett Packard
8510 Automatic Network Analyzer with Synthesized Sweeper operating to 100
GHz, HP 8753 Automatic Network Analyzer operating to 6 GHz, a 40-foot indoor
anechoic chamber for antenna pattern measurement from 2 GHz to millimeter
wave frequencies, a rooftop range for UHF antenna measurement, and
VAX and SUN workstations with appropriate software for computer-aided-design
of microwave circuits and antennas. Other equipment includes sweepers,
isolators, tuners, spectrum analyzers, power meters, detectors, slotted
lines, directional couplers, switches, attenuators, and waveguides that
operate at frequencies to 100 GHz.
Electro-optic
The Electro-optic Facilities are housed in six labs
comprising 5500-square feet. Equipment available for CEMDAS research include
Ar, Nd:YAG, Ti:sapphire, and dye lasers; high-speed (20 GHz) semiconductor
lasers and photodetectors; a scanning Fabry-Perot interferometer; monochromators;
fiber cleavers and splicers; and numerous vibration-isolated tables, micropositioners,
and Faraday isolators. Electronic and microwave equipment includes
signal sources and spectrum analyzers to > 25 GHz; a 14 GHz sampling oscilloscope;
and numerous analog and digital oscilloscopes, signal generators, power
supplies, and lock-in amplifiers. Several personal-computer-based data
acquisition and processing systems are also available.